Measurement uncertainty

The uncertainty of the Gannen probe is influenced by its repeatability, thermal drift, tip deviations and workpiece deformation. The combined 3D uncertainty of the sensor is 50 nm.

3D sensor uncertainty (k=3) **		10 nm
Calibration of tip and probe ***		40 nm
Temperature deviations (ΔT < 0,1 K)	<	10 nm
Tip and work piece deformation	<	10 nm
Other deviations	<	10 nm
Combined 3D uncertainty		45 nm

* The analysis is based on three times the standard deviation (k=3) and a maximum displacement of the sensor tip of 10 micrometers in a temperature controlled environment, where temperature variations are within plusminus 0,1 K

** the stated value is mainly determined by machine uncertainty and calibration method